Chapter 53: Acoustic Analysis of a MEMS Microphone

This example problem demonstrates how to analyze the response of a silicon micro-machined microphone using acoustic elements and electrostatic-structural coupled-field elements.

The following features and capabilities are highlighted:

3D acoustic elements
Acoustic element morphing
3D electrostatic-structural elements
Linear perturbation

Topics for this example problem follow:

53.1. Introduction
53.2. Problem Description
53.3. Modeling
53.4. Material Properties
53.5. Boundary Conditions and Loading
53.6. Analysis and Solution Controls
53.7. Results and Discussion
53.8. Recommendations
53.9. References
53.10. Input Files

You can also perform this example analysis entirely in the Ansys Mechanical Application. For more information, see Acoustic Analysis of a MEMS Microphone in the Mechanical Technology Showcase: Example Problems.