The static analysis is primarily used to prestress the structure by applying a DC voltage, but can also be used to postprocess the capacitance (C = charge/voltage) of the air gap .

Figure 53.4: Air Gap Capacitance as a Function of Voltage

The microphone can operate in the audible frequency bandwidth; therefore, the sensitivity of the microphone is analyzed over this range. Sensitivity characterizes the output electrical signal as a function of the applied pressure.

Figure 53.5: Microphone Sensitivity as a Function of Frequency

Figure 53.6: Membrane Deformation at 20,000 Hz

Figure 53.7: Housing Sound Pressure Level at 20,000 Hz