53.9. References

The following reference works are cited in (or were consulted when creating) this example problem:

  1. Dehé, A. (February, 2007). Silicon microphone development and application. Sensors and Actuators A: Physical. 133(2):283-287.

  2. Czarny, J. (2015). Conception, fabrication and characterization of a MEMS microphone. Ph.D. Thesis. National Institute of Applied Sciences. Lyon, France.