Mechanics of Running the LPCVD Models of this manual provides instruction on the mechanics of using the LPCVD Models through the Ansys Chemkin Interface. LPCVD Thermal Analyzer Keyword Input and LPCVD Furnace Model Keyword Input describe the keyword phrases used in the LPCVD reactor model input file. LPCVD Thermal Analyzer Sample and LPCVD Furnace Model Sample describe a sample problem involving the deposition of silicon from silane, including both Thermal Analyzer and Furnace input and results. LPCVD Thermal Analyzer Equations and LPCVD Furnace Model Equations describe the governing equations and the numerical solution methods for the LPCVD Thermal Analyzer and Furnace models.

A global list of nomenclature used in the Ansys Chemkin software is available in the Chemkin Theory Manual.