Chapter 5: LPCVD Thermal Analyzer Sample

This chapter presents a sample problem using the LPCVD Thermal Analyzer model. The sample project file, lpcvd_furnace__thermal_analysis.ckprj, and is provided with the standard installation of the Ansys Chemkin software. This example is a steady-state problem for a reactor with two quartz tubes (the furnace tube and a liner tube), three heater zones and five thermocouple locations. It is very similar to the reactor used in sample problem for the LPCVD Furnace model.