Chemkin LPCVD Thermal Analyzer and Furnace Manual

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1. Introduction

1.1. Organization of the Manual

2. Mechanics of Running the LPCVD Models

3. LPCVD Thermal Analyzer Keyword Input

3.1. Keyword Syntax and Rules

3.2. Specify the Grid

3.3. Specify the Reactor

3.4. Specify the Initial Conditions

3.5. Specify the Heater Conditions

3.6. Specify the End Cap Conditions

3.7. Specify the Thermocouple Locations

3.8. Solve the Model

3.9. Specify the Solver Controls

3.9.1. Specify the Twopnt Controls
3.9.2. Specify the DASPK Controls

3.10. Output Files

3.10.1. Diagnostic Output File
3.10.2. Temperature Profile for LPCVD Furnace Model

4. LPCVD Furnace Model Keyword Input

4.1. Keyword Syntax and Rules

4.2. CHEMKIN Initialization

4.3. Get a Model

4.3.1. Specify the Geometry
4.3.2. Specify an Injector
4.3.3. Specify the Grid
4.3.4. Specify the Guess
4.3.5. Specify the Operating Conditions
4.3.6. Specify the Material Properties

4.4. Solve the Problem

4.5. Output Instructions

4.5.1. Print the Solution
4.5.2. Print Deposition Uniformity
4.5.3. Plot the Solution

4.6. Write/Destroy the Model

5. LPCVD Thermal Analyzer Sample

5.1. Model Input
5.2. Model Results

6. LPCVD Furnace Model Sample

6.1. Model Input
6.2. Model Results

7. LPCVD Thermal Analyzer Equations

7.1. Reactor Model
7.2. Thermocouple Model

8. LPCVD Furnace Model Equations

8.1. Governing Equations

8.2. Transport Options

8.3. Boundary Conditions

8.4. Numerical Solution

8.4.1. Discrete Equations
8.4.2. Grid Description
8.4.3. Numerical Solver

Bibliography