The static analysis is primarily used to prestress the structure by applying a DC voltage, but it can also be used to postprocess the capacitance (C = charge/voltage) of the air gap.

Figure 53.11: Air Gap Capacitance as a Function of Voltage

The capacitance results can be plotted using these commands:

The microphone can operate in the audible frequency bandwidth. Therefore, the sensitivity of the microphone is analyzed over this range. Sensitivity characterizes the output electrical signal as a function of the applied pressure.

Figure 53.12: Sensitivity as a Function of Frequency

The sensitivity results can be plotted using these commands:

Figure 53.13: Membrane Deformation at 20,000 Hz

Figure 53.14: Housing Sound Pressure Level at 20,000 Hz