PLOT THE SOLUTION

Title of keyword block indicating that plotting files should be written. Requires END statement to close keyword block.

WRITE THE TECPLOT FILES

Title of keyword sub-block indicating that a set of output files suitable for plotting using the Tecplot[2] program should be written. Part of the PLOT THE SOLUTION keyword block. Requires END statement to close keyword sub-block.

DEPOSIT RATES AVERAGED OVER WAFER SIDES =

Indicates that deposition rates reported should be averaged over both sides of the wafer. This is generally a small effect that can be ignored, but may be significant in some special cases. Part of the WRITE THE TECPLOT FILES keyword sub-block.

Example: DEPOSIT RATES AVERAGED OVER WAFER SIDES = YES

Default: Yes

FILE NAME FOR 1D GAS DATA =

Gives the file name that should be used for the solution of gas-phase mole fractions and temperature in the annular region as a function of axial position in the reactor. Part of the WRITE THE TECPLOT FILES keyword sub-block.

Example: FILE NAME FOR 1D GAS DATA = Silane1dGas.plt

Default: 1d_gas.plt

FILE NAME FOR 1D SURFACE DATA =

Gives the file name that should be used for the solution of deposition rates in the annular region as a function of axial position in the reactor. Part of the WRITE THE TECPLOT FILES keyword sub-block.

Example: FILE NAME FOR 1D SURFACE DATA = Silane1dSurf.plt

Default: 1d_surface.plt

FILE NAME FOR 2D GAS DATA =

Gives the file name that should be used for the solution of gas-phase mole fractions and temperature as a function of axial and radial position in the reactor. Part of the WRITE THE TECPLOT FILES keyword sub-block.

Example: FILE NAME FOR 2D GAS DATA = Silane2dGas.plt

Default: 2d_gas.plt

FILE NAME FOR 2D SURFACE DATA =

Gives the file name that should be used for the solution of surface site fractions, deposition rates and surface temperatures as a function of axial and radial position in the reactor. Part of the WRITE THE TECPLOT FILES keyword sub-block.

Example: FILE NAME FOR 2D SURFACE DATA = Silane2dSurf.plt

Default: 2d_surface.plt