PRINT DEPOSITION UNIFORMITY

Title of keyword block indicating that deposition uniformity information should be calculated and put into the output file (e.g. ovend.out). Requires END statement to close keyword block.

Default: No deposition unit will be printed.

FIRST USABLE WAFER =

Gives the number of the first wafer that should be included in the calculation of axial deposition uniformity. Part of the PRINT DEPOSITION UNIFORMITY keyword block.

Example: FIRST USABLE WAFER = 20

Units: None

Default: 1

LAST USABLE WAFER =

Gives the number of the last wafer that should be included in the calculation of axial deposition uniformity. Part of the PRINT DEPOSITION UNIFORMITY keyword block.

Example: LAST USABLE WAFER = 120

Units: None

Default: (last wafer)

USABLE WAFER RADIUS =

Gives the radial distance that should be included in the calculation of radial deposition uniformity. Should only be present when ANNULAR PROBLEM ONLY = NO. Part of the PRINT DEPOSITION UNIFORMITY keyword block.

Example: USABLE WAFER RADIUS = 6.6

Units: cm

Default: (full wafer radius)