5.1. Model Input

The LPCVD Thermal Analyzer sample project specifies a reactor that is 228.6 cm long and ~30 cm in diameter. That diameter corresponds to the inner quartz liner tube, but the Thermal Analyzer also considers the main quartz furnace tube with a diameter of ~ 32 cm, as well as the heaters, which have a diameter of ~42 cm, and the insulation for the heaters. The reactor has 150 wafers, each 15 cm in diameter and spaced 0.47919 cm apart. All five zones of the heater are set to 873.15 K (600 C). The project specifies material and thermal properties for the various parts of the furnace and insulation, as well as thermocouple locations and an initial guess for the temperatures. The gas flow and pressure are neglected. The project also specifies numerical error tolerances, printing levels and other controls.