The following reference works are relevant to this example problem:
Dehé , A. (February, 2007). Silicon microphone development and application.
Sensors and Actuators A: Physical. 133(2):283-287
Czarny, J. (2015). Conception, fabrication, and characterization of a MEMS microphone.
Ph.D. Thesis. National Institute of Applied Sciences. Lyon, France..
