The structural material properties are as follows:
| Material Properties | Back Plate | Membrane (Silicon) |
| Young’s modulus (MPa) | 2.7E5 | 1.69E5 |
| Poisson’s ratio | 0.066 | 0.066 |
| Density (Kg/m3 ) | 2329 | 2329 |
| Constant Structural Damping Coefficient | 0.04 | 0.04 |
| Coefficient of Thermal Expansion (°C-1) | 1E-6 | 1E-6 |
The acoustic material properties are as follows:
| Material Properties | Sound Port and Housing Cavity (Air) |
| Density (Kg/m3 ) | 1.2041 |
| Speed of Sound (m/s) | 343.24 |
| LRF Model – Thin Layer Thickness | 2.2 μm |
The interaction between an acoustic pressure wave in a viscous fluid and a rigid wall is considered for specific structures according to the Low Reduced Frequency (LRF) approximation.
The electrostatic-structural material properties are as follows:
| Material Properties | Air Gap |
| Young’s modulus (Pa) | 1 |
| Poisson’s ratio | 0 |
| Density (Kg/m3) | 0 |
| Relative Electric Permittivity | 1 |