SPECIFY THE GRID

Title of keyword sub-block that helps form a grid. Part of the DEFINE A MODEL keyword block. Cannot be altered using CHANGE THE MODEL. Requires END statement to close keyword sub-block.

ANNULAR PROBLEM ONLY =

Indicates that only the axial problem should be solved, that is, the radial grid should not be constructed. This requires far fewer computational resources and will provide a solution much faster. No results for intra-wafer deposition uniformity are given with this option. Part of the SPECIFY THE GRID keyword sub-block.

Example: ANNULAR PROBLEM ONLY = YES

Units: None

Default: No

MAXIMUM AXIAL STEP AFTER WAFERS =

Gives the largest step that is allowed when building the axial part of the grid in the part of the reactor on the far end of the wafers. The value of this parameter should be no less than the value of WAFER SPACING specified in the GEOMETRY keyword block. Part of the SPECIFY THE GRID keyword sub-block.

Example: MAXIMUM AXIAL STEP AFTER WAFERS = 3.0

Units: cm

Default: 10.0

MAXIMUM AXIAL STEP AMONG WAFERS =

Gives the largest step that is allowed when building the axial part of the grid in the part of the reactor where the wafers sit. The value of this parameter should be no less than the value of WAFER SPACING specified in the GEOMETRY keyword block. Part of the SPECIFY THE GRID keyword sub-block.

Example: MAXIMUM AXIAL STEP AMONG WAFERS = 3.0

Units: cm

Default: 10.0

MAXIMUM AXIAL STEP BEFORE WAFERS =

Gives the largest step that is allowed when building the axial part of the grid in the part of the reactor on the near end of the wafers. The value of this parameter should be no less than the value of WAFER SPACING specified in the GEOMETRY keyword block. Part of the SPECIFY THE GRID keyword sub-block.

Example: MAXIMUM AXIAL STEP BEFORE WAFERS = 3.0

Units: cm

Default: 10.0

MAXIMUM AXIAL STEP RATIO AFTER WAFERS =

Gives the largest ratio between step sizes that is allowed when building the axial part of the grid in the part of the reactor on the far end of the wafers. Part of the SPECIFY THE GRID keyword sub-block.

Example: MAXIMUM AXIAL STEP RATIO AFTER WAFERS = 4.0

Units: None

Default: 3.0

MAXIMUM AXIAL STEP RATIO AMONG WAFERS =

Gives the largest ratio between step sizes that is allowed when building the axial part of the grid in the part of the reactor where the wafers sit. Part of the SPECIFY THE GRID keyword sub-block.

Example: : MAXIMUM AXIAL STEP RATIO AMONG WAFERS = 4.0

Units: None

Default: 3.0

MAXIMUM AXIAL STEP RATIO BEFORE WAFERS =

Gives the largest ratio between step sizes that is allowed when building the axial part of the grid in the part of the reactor on the near end of the wafers. Part of the SPECIFY THE GRID keyword sub-block.

Example: MAXIMUM AXIAL STEP RATIO BEFORE WAFERS = 4.0

Units: None

Default: 3.0

MAXIMUM RADIAL STEP =

Gives the largest step that is allowed when building the radial part of the grid. Should only be present when ANNULAR PROBLEM ONLY = NO. Part of the SPECIFY THE GRID keyword sub-block.

Example: MAXIMUM RADIAL STEP = 2.0

Units: cm

Default: 2.0

MAXIMUM RADIAL STEP RATIO =

Gives the largest ratio between step sizes that is allowed when building the radial part of the grid. Should only be present when ANNULAR PROBLEM ONLY = NO. Part of the SPECIFY THE GRID keyword sub-block.

Example: MAXIMUM RADIAL STEP RATIO = 3.0

Units: None

Default: 3.0

STEP AT INJECTORS =

Gives the largest step that is allowed when building the axial part of the grid near gas injectors, where the grid is usually finer. Part of the SPECIFY THE GRID keyword sub-block.

Example: STEP AT INJECTORS = 2.0

Units: cm

Default: 2.0

STEP AT OVEN END =

Gives the largest step that is allowed when building the axial part of the grid near the ends of the reactor. Part of the SPECIFY THE GRID keyword sub-block.

Example: STEP AT OVEN END = 2.0

Units: cm

Default: 10.0

STEP AT WAFER EDGE =

Gives the largest step that is allowed when building the radial part of the grid near the edge of the wafers, where the grid is usually finer. Should only be present when ANNULAR PROBLEM ONLY = NO. Part of the SPECIFY THE GRID keyword sub-block.

Example: STEP AT WAFER EDGE = 0.5

Units: cm

Default: 0.5