SPECIFY THE REACTOR

Title of keyword block used to specify the dimensions of the reactor and the material properties of the components. This is the largest keyword block. The components of the reactor model that have their dimensions defined in this keyword block are shown in Figure 3.2: Definition of input parameters for the model included in the SPECIFY THE REACTOR keyword block . None of the keywords in this block have defaults; all are required inputs. Requires END statement to close keyword block.

HEATER INNER RADIUS =

Provides the inner radius of the heating elements. Part of the SPECIFY THE REACTOR keyword block.

Example: HEATER INNER RADIUS = 21.0

Units: cm

HEATER OUTER RADIUS =

Provides the outer radius of the heating elements. Part of the SPECIFY THE REACTOR keyword block.

Example: HEATER OUTER RADIUS = 21.3

Units: cm

TUBE LENGTH =

Provides the total length of the reactor tube. Part of the SPECIFY THE REACTOR keyword block.

Example: TUBE LENGTH = 100.0

Units: cm

INSULATION THICKNESS ON HEATERS =

Provides the thickness of the insulation on the outside of the heaters. The thermal properties of the insulation covering the heaters and entrance and exit caps are assumed to be the same. Part of the SPECIFY THE REACTOR keyword block.

Example: INSULATION THICKNESS ON HEATERS = 8.0

Units: cm

THICKNESS ENTRANCE CAP =

Provides the thickness of the entrance cap. The thermal properties of the entrance and exit caps are assumed to be identical, as are the thermal properties of the two quartz tubes. Part of the SPECIFY THE REACTOR keyword block.

Example:: THICKNESS ENTRANCE CAP = 3.0

Units: cm

THICKNESS INSULATION ON ENTRANCE CAP =

Provides the thickness of the insulation on the entrance cap. Part of the SPECIFY THE REACTOR keyword block.

Example: THICKNESS INSULATION ON ENTRANCE CAP = 0.1

Units: cm

THICKNESS EXIT CAP =

Provides the thickness of the exit cap. The thermal properties of the entrance and exit caps are assumed to be identical, as are the thermal properties of the two quartz tubes. Part of the SPECIFY THE REACTOR keyword block.

Example: THICKNESS EXIT CAP = 3.0

Units: cm

THICKNESS INSULATION ON EXIT CAP =

Provides the thickness of the insulation on the exit cap. Part of the SPECIFY THE REACTOR keyword block.

Example: THICKNESS INSULATION ON EXIT CAP = 0.1

Units: cm

LOCATION OF FIRST WAFER =

Provides the axial location of the first wafer in the load. This is measured from the entrance of the inner quartz reactor tube. Part of the SPECIFY THE REACTOR keyword block.

Example:: LOCATION OF FIRST WAFER = 30.0

Units: cm

LOCATION OF LAST WAFER =

Provides the axial location of the last wafer in the load. This is measured from the entrance of the inner quartz reactor tube. Part of the SPECIFY THE REACTOR keyword block.

Example: LOCATION OF LAST WAFER = 90.0

Units: cm

WAFER RADIUS =

Provides the radius of the wafers in the load. Part of the SPECIFY THE REACTOR keyword block.

Example: WAFER RADIUS = 10.0

Units: cm

WAFER THICKNESS =

Provides the thickness of each wafer in the load. Part of the SPECIFY THE REACTOR keyword block.

Example: WAFER THICKNESS = 6.35E-02

Units: cm

EMISS. OF WAFERS =

Provides the emissivity of the wafers in the load. The model assumes that the reflectivity of the (opaque) wafer material is equal to one minus the emissivity. Part of the SPECIFY THE REACTOR keyword block.

Example: EMISS. OF WAFERS = 0.70

Units: None

EMISS. OF REACTOR HEATERS =

Provides the emissivity of the heaters for the reactor. The model assumes that the reflectivity of this opaque material is equal to one minus the emissivity. Part of the SPECIFY THE REACTOR keyword block.

Example: EMISS. OF REACTOR HEATERS = 0.90

Units: None

EMISS. OF REACTOR ENTRANCE AND EXIT CAPS =

Provides the emissivity of the entrance and exit caps. The model assumes that the reflectivity is equal to one minus the emissivity. Part of the SPECIFY THE REACTOR keyword block.

Example: EMISS. OF REACTOR ENTRANCE AND EXIT CAPS = 0.20

Units: None

EMISS. OF MAIN SECTION OUTER SKIN =

Provides the emissivity of the outer skin of the main (load) section of the reactor. The model assumes that the reflectivity is equal to one minus the emissivity. Part of the SPECIFY THE REACTOR keyword block.

Example: EMISS. OF MAIN SECTION OUTER SKIN = 0.55

Units: None

EMISS. OF ENTRANCE SECTION OUTER SKIN =

Provides the emissivity of the outer skin of the entrance section of the reactor. The model assumes that the reflectivity is equal to one minus the emissivity. Part of the SPECIFY THE REACTOR keyword block.

Example: EMISS. OF ENTRANCE SECTION OUTER SKIN = 0.55

Units: None

EMISS. OF EXIT SECTION OUTER SKIN =

Provides the emissivity of the outer skin of the exit section of the reactor. The model assumes that the reflectivity is equal to one minus the emissivity. Part of the SPECIFY THE REACTOR keyword block.

Example: EMISS. OF EXIT SECTION OUTER SKIN = 0.55

Units: None

MAIN SECTION CONVECTIVE HEAT LOSS COEF. =

Provides the convective heat transfer coefficient for the main (load) section of the reactor. Part of the SPECIFY THE REACTOR keyword block.

Example: MAIN SECTION CONVECTIVE HEAT LOSS COEF. = 6.5E-04

Units: W cm^-2 K^-1

ENTRANCE SECTION CONVECTIVE HEAT LOSS COEF. =

Provides the convective heat transfer coefficient for the entrance section of the reactor. Part of the SPECIFY THE REACTOR keyword block.

Example: ENTRANCE SECTION CONVECTIVE HEAT LOSS COEF. = 6.5E-04

Units: W cm^-2 K^-1

EXIT SECTION CONVECTIVE HEAT LOSS COEF. =

Provides the convective heat transfer coefficient for the exit section of the reactor. Part of the SPECIFY THE REACTOR keyword block.

Example: EXIT SECTION CONVECTIVE HEAT LOSS COEF. = 6.5E-04

Units: W cm^-2 K^-1

ENTRANCE CAP CONVECTIVE HEAT LOSS COEF. =

Provides the convective heat transfer coefficient for the entrance cap of the reactor. Part of the SPECIFY THE REACTOR keyword block.

Example: ENTRANCE CAP CONVECTIVE HEAT LOSS COEF. = 5.8E-04

Units: W cm^-2 K^-1

EXIT CAP CONVECTIVE HEAT LOSS COEF. =

Provides the convective heat transfer coefficient for the exit cap of the reactor. Part of the SPECIFY THE REACTOR keyword block.

Example: EXIT CAP CONVECTIVE HEAT LOSS COEF. = 7.5E-04

Units: W cm^-2 K^-1

SPECIFIC HEAT OF WAFER MATERIAL =

Provides the specific heat, or heat capacity, for the wafers in the reactor. Part of the SPECIFY THE REACTOR keyword block.

Example: SPECIFIC HEAT OF WAFER MATERIAL = 0.932

Units: J g^-1 K^-1

DENSITY OF WAFER MATERIAL =

Provides the density of the wafer material. Part of the SPECIFY THE REACTOR keyword block.

Example: DENSITY OF WAFER MATERIAL = 2.330

Units:: g cm^-3

THERMAL CONDUCTIVITY OF WAFER MATERIAL =

Provides the thermal conductivity of the wafer material. Part of the SPECIFY THE REACTOR keyword block.

Example: THERMAL CONDUCTIVITY OF WAFER MATERIAL = 0.369

Units: W cm^-1 K^-1

SPECIFIC HEAT OF HEATER MATERIAL =

Provides the specific heat, or heat capacity, for the heater material. Part of the SPECIFY THE REACTOR keyword block.

Example: SPECIFIC HEAT OF HEATER MATERIAL = 0.148

Units: J g^-1 K^-1

DENSITY OF HEATER MATERIAL =

Provides the density of the heater material. Part of the SPECIFY THE REACTOR keyword block.

Example: DENSITY OF HEATER MATERIAL = 19.3

Units: g cm^-3

THERMAL CONDUCTIVITY OF HEATER MATERIAL =

Provides the thermal conductivity of the heater material. Part of the SPECIFY THE REACTOR keyword block.

Example: THERMAL CONDUCTIVITY OF HEATER MATERIAL = 1.18

Units: W cm^-1 K^-1

SPECIFIC HEAT OF INSULATION MATERIAL =

Provides the specific heat, or heat capacity, of the insulation material. Part of the SPECIFY THE REACTOR keyword block.

Example: SPECIFIC HEAT OF INSULATION MATERIAL = 0.96

Units: J g^-1 K^-1

DENSITY OF INSULATION MATERIAL =

Provides the density of the insulation material. Part of the SPECIFY THE REACTOR keyword block.

Example: DENSITY OF INSULATION MATERIAL = 2.65

Units: g cm^-3

THERMAL CONDUCTIVITY OF INSULATION MATERIAL =

Provides the thermal conductivity for the insulation material. Part of the SPECIFY THE REACTOR keyword block.

Example:: THERMAL CONDUCTIVITY OF INSULATION MATERIAL = 1.0E-02

Units: W cm^-1 K^-1

SPECIFIC HEAT OF QUARTZ TUBE MATERIAL =

Provides the specific heat, or heat capacity, for the quartz tube material. Part of the SPECIFY THE REACTOR keyword block.

Example: SPECIFIC HEAT OF QUARTZ TUBE MATERIAL = 1.13

Units: J g^-1 K^-1

DENSITY OF QUARTZ TUBE MATERIAL =

Provides the density of the quartz tube material. Part of the SPECIFY THE REACTOR keyword block.

Example: DENSITY OF QUARTZ TUBE MATERIAL = 2.22

Units: g cm^-3

THERMAL CONDUCTIVITY OF QUARTZ TUBE MATERIAL =

Provides the thermal conductivity for the quartz tube material. Part of the SPECIFY THE REACTOR keyword block.

Example: THERMAL CONDUCTIVITY OF QUARTZ TUBE MATERIAL = 0.0252

Units: W cm^-1 K^-1

INNER RADIUS OF FIRST QUARTZ TUBE =

Provides the inner radius of the first (inner) quartz tube. Part of the SPECIFY THE REACTOR keyword block.

Example: INNER RADIUS OF FIRST QUARTZ TUBE = 14.5

Units: cm

OUTER RADIUS OF FIRST QUARTZ TUBE =

Provides the outer radius of the first (inner) quartz tube. Part of the SPECIFY THE REACTOR keyword block.

Example: OUTER RADIUS OF FIRST QUARTZ TUBE = 15.0

Units: cm

TRANSMITTANCE OF FIRST QUARTZ TUBE =

Provides the transmittance of the first (inner) quartz tube. For the semitransparent quartz tubes the transmittance, reflectance, and absorptance of each tube must be specified and add up to one. Otherwise the model prints an error message and terminates execution. Part of the SPECIFY THE REACTOR keyword block.

Example: TRANSMITTANCE OF FIRST QUARTZ TUBE = 0.70

Units: None

REFLECTANCE OF FIRST QUARTZ TUBE =

Provides the reflectance of the first (inner) quartz tube. For the semitransparent quartz tubes the transmittance, reflectance, and absorptance of each tube must be specified and add up to one. Otherwise the model prints an error message and terminates execution. Part of the SPECIFY THE REACTOR keyword block.

Example: REFLECTANCE OF FIRST QUARTZ TUBE = 0.20

Units: None

ABSORPTANCE OF FIRST QUARTZ TUBE =

Provides the absorptance of the first (inner) quartz tube. For the semitransparent quartz tubes the transmittance, reflectance, and absorptance of each tube must be specified and add up to one. Otherwise the model prints an error message and terminates execution. The emittance of the quartz tube is assumed equal to its absorptance. Part of the SPECIFY THE REACTOR keyword block.

Example: ABSORPTANCE OF FIRST QUARTZ TUBE = 0.10

Units: None

INNER RADIUS OF SECOND QUARTZ TUBE =

Provides the inner radius of the second (outer) quartz tube. Part of the SPECIFY THE REACTOR keyword block.

Example: INNER RADIUS OF SECOND QUARTZ TUBE = 16.0

Units: cm

OUTER RADIUS OF SECOND QUARTZ TUBE =

Provides the outer radius of the second (outer) quartz tube. Part of the SPECIFY THE REACTOR keyword block.

Example: OUTER RADIUS OF SECOND QUARTZ TUBE = 16.5

Units: cm

TRANSMITTANCE OF SECOND QUARTZ TUBE =

Provides the transmittance of the second (outer) quartz tube. For the semitransparent quartz tubes the transmittance, reflectance, and absorptance of each tube must be specified and add up to one. Otherwise the model prints an error message and terminates execution. Part of the SPECIFY THE REACTOR keyword block.

Example: TRANSMITTANCE OF SECOND QUARTZ TUBE = 0.70

Units: None

REFLECTANCE OF SECOND QUARTZ TUBE =

Provides the reflectance of the second (outer) quartz tube. For the semitransparent quartz tubes the transmittance, reflectance, and absorptance of each tube must be specified and add up to one. Otherwise the model prints an error message and terminates execution. Part of the SPECIFY THE REACTOR keyword block.

Example:: REFLECTANCE OF SECOND QUARTZ TUBE = 0.20

Units: None

ABSORPTANCE OF SECOND QUARTZ TUBE =

Provides the absorptance of the second (outer) quartz tube. For the semitransparent quartz tubes the transmittance, reflectance, and absorptance of each tube must be specified and add up to one. Otherwise the model prints an error message and terminates execution. The emittance of the quartz tube is assumed equal to its absorptance. Part of the SPECIFY THE REACTOR keyword block.

Example: ABSORPTANCE OF SECOND QUARTZ TUBE = 0.10

Units: None

DENSITY ENTRANCE CAP MATERIAL =

Provides the density of the entrance cap material. Part of the SPECIFY THE REACTOR keyword block.

Example: DENSITY ENTRANCE CAP MATERIAL = 8.0

Units: g cm^-3

DENSITY OF EXIT CAP MATERIAL =

Provides the density of the exit cap material. Part of the SPECIFY THE REACTOR keyword block.

Example: DENSITY OF EXIT CAP MATERIAL = 8.0

Units: g cm^-3

DENSITY OF INSULATION ON ENTRANCE CAP =

Provides the density of the insulation material on the entrance cap. Part of the SPECIFY THE REACTOR keyword block.

Example:: DENSITY OF INSULATION ON ENTRANCE CAP = 0.25

Units: g cm^-3

DENSITY OF INSULATION ON EXIT CAP =

Provides the density of the insulation material on the exit cap. Part of the SPECIFY THE REACTOR keyword block.

Example: DENSITY OF INSULATION ON EXIT CAP = 0.25

Units: g cm^-3

THERMAL CONDUCTIVITY OF ENTRANCE CAP =

Provides thermal conductivity for the entrance cap material. Part of the SPECIFY THE REACTOR keyword block.

Example: THERMAL CONDUCTIVITY OF ENTRANCE CAP = 0.15

Units: W cm^-1 K^-1

THERMAL CONDUCTIVITY OF EXIT CAP =

Provides thermal conductivity for the exit cap material. Part of the SPECIFY THE REACTOR keyword block.

Example: THERMAL CONDUCTIVITY OF EXIT CAP = 0.15

Units: W cm^-1 K^-1

THERMAL CONDUCTIVITY OF ENTRANCE CAP INSULATION =

Provides thermal conductivity for the insulation material for the entrance cap. Part of the SPECIFY THE REACTOR keyword block.

Example: THERMAL CONDUCTIVITY OF ENTRANCE CAP INSULATION = 1.0

Units: W cm^-1 K^-1

THERMAL CONDUCTIVITY OF EXIT CAP INSULATION =

Provides thermal conductivity for the insulation material for the exit cap. Part of the SPECIFY THE REACTOR keyword block.

Example: THERMAL CONDUCTIVITY OF EXIT CAP INSULATION = 1.0

Units: W cm^-1 K^-1

SPECIFIC HEAT OF ENTRANCE CAP =

Provides the specific heat, or heat capacity, for the entrance cap material. Part of the SPECIFY THE REACTOR keyword block.

Example: SPECIFIC HEAT OF ENTRANCE CAP = 0.6

Units: J g^-1 K^-1

SPECIFIC HEAT OF EXIT CAP =

Provides the specific heat, or heat capacity, for the exit cap material. Part of the SPECIFY THE REACTOR keyword block.

Example: SPECIFIC HEAT OF EXIT CAP = 0.6

Units: J g^-1 K^-1

SPECIFIC HEAT OF ENTRANCE CAP INSULATION =

Provides the specific heat, or heat capacity, for the insulation material for the entrance cap. Part of the SPECIFY THE REACTOR keyword block.

Example: SPECIFIC HEAT OF ENTRANCE CAP INSULATION = 0.01

Units: J g^-1 K^-1

SPECIFIC HEAT OF EXIT CAP INSULATION =

Provides the specific heat, or heat capacity, for the insulation material for the exit cap. Part of the SPECIFY THE REACTOR keyword block.

Example: SPECIFIC HEAT OF EXIT CAP INSULATION = 0.01

Units: J g^-1 K^-1

EMISS. OF ENTRANCE CAP OUTER SKIN =

Provides the emissivity of the outer skin of the entrance cap. The model assumes that the reflectivity of this opaque material is equal to one minus the emissivity. Part of the SPECIFY THE REACTOR keyword block.

Example: EMISS. OF ENTRANCE CAP OUTER SKIN = 0.20

Units: None

EMISS. OF EXIT CAP OUTER SKIN =

Provides the emissivity of the outer skin of the exit cap. The model assumes that the reflectivity of this opaque material is equal to one minus the emissivity. Part of the SPECIFY THE REACTOR keyword block.

Example: EMISS. OF EXIT CAP OUTER SKIN = 0.20

Units: None