SPECIFY THE THERMOCOUPLE LOCATIONS

Title of keyword block used to specify the axial locations of thermocouple probes placed between the two quartz tubes. A series of up to 5 thermocouple locations are specified by giving the axial location and corresponding temperature. Thermocouple numbers must be specified in order of increasing . Thermocouple locations are restricted to lie at axial locations somewhere between the first and last wafers. After the LPCVD Thermal Analyzer computes the steady-state temperature distribution in the reactor it computes the temperatures of the thermocouples which are included in the output. Requires END statement to close keyword block.

Z(#) =

Provides the axial location of the specified (# ≤ 5) thermocouple relative to the beginning of the quartz tubes. Thermocouple numbers must be specified in order of increasing . Part of the SPECIFY THE THERMOCOUPLE LOCATIONS keyword block.

Example: Z(1) = 8.73Z(2) = 20.8

Units: cm