SPECIFY THE GEOMETRY

Title of keyword sub-block that defines the reactor geometry. Part of the DEFINE A MODEL keyword block. Requires END statement to close keyword sub-block.

NEAR END WAFER POSITION =

Provides the position of the first wafer in the reactor. Distances are measured from the near end of the reactor to the far end, which is defined as the end where gases flow out of the reactor. The total number of wafers combined with the wafer spacing must exactly agree with the positions of first and last wafers. Part of the SPECIFY THE GEOMETRY keyword sub-block.

Example: NEAR END WAFER POSITION = 12.5

Units: cm

Default: None, this is a required input.

FAR END WAFER POSITION =

Provides the position of the last wafer in the reactor. Distances are measured from the near end of the reactor to the far end, which is defined as the end where gases flow out of the reactor. The total number of wafers combined with the wafer spacing must exactly agree with the positions of first and last wafers. Part of the SPECIFY THE GEOMETRY keyword sub-block.

Example: FAR END WAFER POSITION = 83.26

Units: cm

Default: None, this is a required input.

NUMBER OF WAFERS =

Provides the number of wafers in the reactor. The total number of wafers combined with the wafer spacing must exactly agree with the positions of first and last wafers. Part of the SPECIFY THE GEOMETRY keyword sub-block.

Example: NUMBER OF WAFERS = 200

Units: None, but must be given as an integer.

Default: None, this is a required input.

OVEN LENGTH =

Provides the length of the reactor, which is also the position of the far end of the reactor. Part of the SPECIFY THE GEOMETRY keyword sub-block.

Example: OVEN LENGTH = 120.0

Units: cm

Default: None, this is a required input.

OVEN RADIUS =

Provides the radius of the reactor. Part of the SPECIFY THE GEOMETRY keyword sub-block.

Example: OVEN RADIUS = 11.0

Units: cm

Default: None, this is a required input.

WAFER RADIUS =

Provides the radius of the wafers. Part of the SPECIFY THE GEOMETRY keyword sub-block.

Example: WAFER RADIUS = 7.62

Units: cm

Default: None, this is a required input.

WAFER SPACING =

Provides the spacing of the wafers. The total number of wafers combined with the wafer spacing must exactly agree with the positions of first and last wafers. Wafer positions and spacings are defined with respect to their centers, so wafers with a thickness of 0.06 cm and a spacing of 1 cm actually have a 0.94 cm gap between them. Part of the SPECIFY THE GEOMETRY keyword sub-block.

Example: WAFER SPACING = 0.3556

Units: cm

Default: None, this is a required input.

WAFER THICKNESS =

Provides the thickness of the wafers. Wafer positions and spacings are defined with respect to their centers, so wafers with a thickness of 0.06 cm and a spacing of 1 cm actually have a 0.94 cm gap between them. Part of the SPECIFY THE GEOMETRY keyword sub-block.

Example: WAFER THICKNESS = 0.067

Units: cm

Default: 0.06