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SPECIES MOLECULAR ELEMENT COUNT
CONSIDERED WEIGHT Density Nsites H N SI F
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Gas phase species:
1. H2 2.0159E+00 2 0 0 0
2. H 1.0080E+00 1 0 0 0
3. N2 2.8013E+01 0 2 0 0
4. N 1.4007E+01 0 1 0 0
5. NH 1.5015E+01 1 1 0 0
6. NH2 1.6023E+01 2 1 0 0
7. NNH 2.9021E+01 1 2 0 0
8. N2H2 3.0029E+01 2 2 0 0
9. N2H3 3.1037E+01 3 2 0 0
10. N2H4 3.2045E+01 4 2 0 0
11. HF 2.0006E+01 1 0 0 1
12. F 1.8998E+01 0 0 0 1
13. SIF4 1.0408E+02 0 0 1 4
14. SIF3 8.5081E+01 0 0 1 3
15. SIHF3 8.6089E+01 1 0 1 3
16. SIF3NH2 1.0110E+02 2 1 1 3
17. NH3 1.7031E+01 3 1 0 0
SITE: SI3N4 0.417E-08 moles/cm**2
18. NHSIF(S) 6.2099E+01 2 1 1 1 1
19. SIF3NH2(S) 1.0110E+02 2 2 1 1 3
20. SIF2NH(S) 8.1097E+01 2 1 1 1 2
21. NH2SIFNH(S) 7.8122E+01 2 3 2 1 1
22. NHSIFNHSIFNH(S) 1.3921E+02 4 3 3 2 2
23. NHNH2(S) 3.1037E+01 2 3 2 0 0
BULK: BULK1
24. SI(D) 2.8086E+01 2.066E+00 g/cm**3 0 0 1 0
BULK: BULK2
25. N(D) 1.4007E+01 1.374E+00 g/cm**3 0 1 0 0
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(k = A T**b exp(-E/RT))
SURFACE REACTIONS CONSIDERED A b E
1. NH3+NHSIF(S)=>NHNH2(S)+SI(D)+HF 7.56E+08 0.5 0.0
2. SIF4+NHNH2(S)=>SIF3NH2(S)+N(D)+HF 3.10E+08 0.5 0.0
3. SIF3NH2(S)=>SIF2NH(S)+HF 1.00E+05 0.0 0.0
4. NH3+SIF2NH(S)=>NH2SIFNH(S)+HF 7.56E+08 0.5 0.0
5. NH2SIFNH(S)+SIF2NH(S) 1.00E+15 0.0 0.0
=>NHSIFNHSIFNH(S)+HF
6. NHSIFNHSIFNH(S)+SIF2NH(S) 1.00E+15 0.0 0.0
=>3NHSIF(S)+N(D)+HF
NOTE: A units mole-cm-sec-K, E units cal/mole
NO ERRORS FOUND ON INPUT: