SITE/SI3N4/    SDEN/4.1683e-9/
   NHSIF(S)/2/
   SIF3NH2(S)/2/
   SIF2NH(S)/2/
   NH2SIFNH(S)/2/
   NHSIFNHSIFNH(S)/4/
   NHNH2(S)/2/
END
BULK SI(D)/2.066/
BULK N(D) /1.374/
END
THERMO ALL
  300.      600.     1685.
NHSIF(S)          J 3/67N   1H   1SI  1F   1S   300.000  1685.000              1
 0.24753989E 01 0.88112187E-03-0.20939481E-06 0.42757187E-11 0.16006564E-13    2
-0.81255620E 03-0.12188747E 02 0.84197538E 00 0.83710416E-02-0.13077030E-04    3
 0.97593603E-08-0.27279380E-11-0.52486288E 03-0.45272678E 01                   4
NHNH2(S)          J 3/67N   2H   3SI  0F   0S   300.000  1685.000              1
 0.24753989E 01 0.88112187E-03-0.20939481E-06 0.42757187E-11 0.16006564E-13    2
-0.81255620E 03-0.12188747E 02 0.84197538E 00 0.83710416E-02-0.13077030E-04    3
 0.97593603E-08-0.27279380E-11-0.52486288E 03-0.45272678E 01                   4
SIF3NH2(S)        J 3/67N   1H   2SI  1F   3S   300.000  1685.000              1
 0.24753989E 01 0.88112187E-03-0.20939481E-06 0.42757187E-11 0.16006564E-13    2
-0.81255620E 03-0.12188747E 02 0.84197538E 00 0.83710416E-02-0.13077030E-04    3
 0.97593603E-08-0.27279380E-11-0.52486288E 03-0.45272678E 01                   4
SIF2NH(S)         J 3/67N   1H   1SI  1F   2S   300.000  1685.000              1
 0.24753989E 01 0.88112187E-03-0.20939481E-06 0.42757187E-11 0.16006564E-13    2
-0.81255620E 03-0.12188747E 02 0.84197538E 00 0.83710416E-02-0.13077030E-04    3
 0.97593603E-08-0.27279380E-11-0.52486288E 03-0.45272678E 01                   4
NH2SIFNH(S)       J 3/67N   2H   3SI  1F   1S   300.000  1685.000              1
 0.24753989E 01 0.88112187E-03-0.20939481E-06 0.42757187E-11 0.16006564E-13    2
-0.81255620E 03-0.12188747E 02 0.84197538E 00 0.83710416E-02-0.13077030E-04    3
 0.97593603E-08-0.27279380E-11-0.52486288E 03-0.45272678E 01                   4
NHSIFNHSIFNH(S)   J 3/67N   3H   3SI  2F   2S   300.000  1685.000              1
 0.24753989E 01 0.88112187E-03-0.20939481E-06 0.42757187E-11 0.16006564E-13    2
-0.81255620E 03-0.12188747E 02 0.84197538E 00 0.83710416E-02-0.13077030E-04    3
 0.97593603E-08-0.27279380E-11-0.52486288E 03-0.45272678E 01                   4
SI(D)             J 3/67SI  100  000  000  0S   300.000  1685.000              1
 0.24753989E 01 0.88112187E-03-0.20939481E-06 0.42757187E-11 0.16006564E-13    2
-0.81255620E 03-0.12188747E 02 0.84197538E 00 0.83710416E-02-0.13077030E-04    3
 0.97593603E-08-0.27279380E-11-0.52486288E 03-0.45272678E 01                   4
N(D)              J 3/67N   100  000  000  0S   300.000  1685.000              1
 0.24753989E 01 0.88112187E-03-0.20939481E-06 0.42757187E-11 0.16006564E-13    2
-0.81255620E 03-0.12188747E 02 0.84197538E 00 0.83710416E-02-0.13077030E-04    3
 0.97593603E-08-0.27279380E-11-0.52486288E 03-0.45272678E 01                   4
END

REACTIONS
 NH3             + NHSIF(S)  => NHNH2(S)   + SI(D) + HF    7.5620E08 0.5 0.0
 SIF4            + NHNH2(S)  => SIF3NH2(S) + N(D)  + HF    3.0967E08 0.5 0.0
 SIF3NH2(S)                  => SIF2NH(S)          + HF    1.0000E05 0.0 0.0
 NH3             + SIF2NH(S) => NH2SIFNH(S)        + HF    7.5620E08 0.5 0.0
 NH2SIFNH(S)     + SIF2NH(S) => NHSIFNHSIFNH(S)    + HF    1.0000E15 0.0 0.0
 NHSIFNHSIFNH(S) + SIF2NH(S) => 3NHSIF(S)  + N(D)  + HF    1.0000E15 0.0 0.0
END