The LPCVD Thermal Analyzer produces a file named temp.dat that is formatted to be read by LPCVD Furnace Model as a temperature input file. The temperature file is formatted input and consists of five parts.
A line with (I3) format that gives the number of sample points,
, that will be
in the temperature profile for the reactor sidewall.
lines of data, each containing a pair of numbers giving an axial position and
the wall temperature at that point in Kelvin, with (E14.7, 1x, E14.7)
format. The wall positions increase from zero at the "near end" of
the reactor and end at the total length.A line with 2(I3) format that gives the numbers of axial and radial sample points,
and 
, that will be in the temperature profiles for the
wafers.Lines giving the
axial positions followed by lines giving the 
radial positions, with E14.7 format. Axial positions increase from the
near-end wafer to the far-end wafer; radial positions increase from zero to the
wafer edge.
lines of data, each containing a wafer temperature in Kelvin, with (E14.7) format, corresponding to the positions in Part (4). These temperatures are ordered with radial position changing most rapidly, that is, the points correspond to 
, 
, 
, 
, 
, 
, 
, etc.
See LPCVD Furnace Model Keyword Input for more information on how this temperature data is used.