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PRESSURE =
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Provides the operating pressure in the reactor. Constant pressure is assumed
in the reactor, which is appropriate for slowly-moving, low-density gases. Part of
the SPECIFY THE OPERATING CONDITIONS keyword sub-block.
Example: PRESSURE = 0.300
Units: Torr
Default: None, this is a required input.
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TEMPERATURE =
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Provides the operating temperature of the reactor for the isothermal case
where all surfaces in the reactor have the same temperature. In this case, the gas
temperature is the same as that of the reactor walls and the wafers. Part of the
SPECIFY THE OPERATING CONDITIONS keyword sub-block.
Example: TEMPERATURE = 873.0
Units: K
Default: None, either a TEMPERATURE or a TEMPERATURE FILE
NAME is required input.
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TEMPERATURE FILE NAME =
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Provides the file name containing detailed information on surface temperature
profiles, for the case where surface temperatures vary with position in the
reactor. This file can be generated by hand from experimental data, or
automatically by the LPCVD Thermal Analyzer. Part of the SPECIFY THE OPERATING
CONDITIONS keyword sub-block. The temperature file is formatted input that has
five parts. A line with (I3) format that gives the number of sample points,
 , that will be in the temperature profile for the reactor
sidewall.  lines of data, each containing a pair of numbers giving an
axial position and the wall temperature at that point in Kelvin, with
(E14.7, 1x, E14.7) format. The wall positions must increase from zero at the
"near end" of the reactor and ending at the total length.
A line with 2(I3) format that gives the number of axial and radial
sample points,  and  , that will be in the temperature profiles for the
wafers. Lines giving the  axial positions followed by lines giving the
 radial positions, with (E14.7) format. Axial positions
increase from the near-end wafer to the far-end wafer; radial positions
increase from zero to the wafer edge.  lines of data, each containing a wafer temperature in
Kelvin, with (E14.7) format, corresponding to the positions in part four.
These temperatures must be ordered correctly with radial position changing
most rapidly, that is, the points should correspond to  ,  ,  ,  ,  ,  ,  , etc.
Sample Temperature File
2
0.0 900.0
100.0 905.0
2 3
30.0
90.0
0.0
5.0
10.0
901.4
901.5
901.6
904.4
904.5
904.6
Example:TEMPERATURE FILE NAME =
Tprofile.dat Units:
None Default: None, either a TEMPERATURE or a
TEMPERATURE FILE NAME is required input. |
