Spiral Inductors on Silicon Substrate: Application Specific Modeling Guide

You can access Spiralmodelingguide.pdf under "<install_dir>\ANSYS Inc\v251\AnsysEM\Help\HFSS".

This Application Specific Modeling Guide is written for Ansys Electronics Desktop beginners as well as experienced users who are using HFSS for the first time. This brief manual provides guidelines for modeling spiral inductors in HFSS.